JPH0731554Y2 - エキシマレーザ発振器 - Google Patents

エキシマレーザ発振器

Info

Publication number
JPH0731554Y2
JPH0731554Y2 JP1987154322U JP15432287U JPH0731554Y2 JP H0731554 Y2 JPH0731554 Y2 JP H0731554Y2 JP 1987154322 U JP1987154322 U JP 1987154322U JP 15432287 U JP15432287 U JP 15432287U JP H0731554 Y2 JPH0731554 Y2 JP H0731554Y2
Authority
JP
Japan
Prior art keywords
gas
laser
container
gases
buffer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987154322U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0158968U (en]
Inventor
良和 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP1987154322U priority Critical patent/JPH0731554Y2/ja
Publication of JPH0158968U publication Critical patent/JPH0158968U/ja
Application granted granted Critical
Publication of JPH0731554Y2 publication Critical patent/JPH0731554Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Lasers (AREA)
JP1987154322U 1987-10-08 1987-10-08 エキシマレーザ発振器 Expired - Lifetime JPH0731554Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987154322U JPH0731554Y2 (ja) 1987-10-08 1987-10-08 エキシマレーザ発振器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987154322U JPH0731554Y2 (ja) 1987-10-08 1987-10-08 エキシマレーザ発振器

Publications (2)

Publication Number Publication Date
JPH0158968U JPH0158968U (en]) 1989-04-13
JPH0731554Y2 true JPH0731554Y2 (ja) 1995-07-19

Family

ID=31430949

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987154322U Expired - Lifetime JPH0731554Y2 (ja) 1987-10-08 1987-10-08 エキシマレーザ発振器

Country Status (1)

Country Link
JP (1) JPH0731554Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3447281B2 (ja) * 2001-12-11 2003-09-16 サイマー・インコーポレーテッド エキシマレーザ用のガス補充の方法と装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6048267U (ja) * 1983-09-09 1985-04-04 日本電気株式会社 炭酸ガスレ−ザ用ガス混合装置

Also Published As

Publication number Publication date
JPH0158968U (en]) 1989-04-13

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